Rutherford backscattering in ion-implanted and pulsed laser annealed Si and Ge

dc.contributor.authorKiger, Shanalyn.en_US
dc.date.accessioned2015-12-31T21:55:38Z
dc.date.available2015-12-31T21:55:38Z
dc.date.issued1985en_US
dc.date.published1985en_US
dc.descriptionCall number: LD2668 .T4 1985 K53en_US
dc.description.degreeMaster of Scienceen_US
dc.description.levelMastersen_US
dc.identifier.urihttp://hdl.handle.net/2097/27521
dc.subject.AATMasters thesesen_US
dc.subject.LCSHBackscattering.en_US
dc.subject.LCSHIon implantation.en_US
dc.subject.LCSHSemiconductors--Impurity distribution.en_US
dc.subject.LCSHSemiconductor lasers.en_US
dc.subject.LCSHGermanium--Spectra.en_US
dc.subject.LCSHSilicon--Spectra.en_US
dc.titleRutherford backscattering in ion-implanted and pulsed laser annealed Si and Geen_US
dc.typeTexten_US

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