Rutherford backscattering in ion-implanted and pulsed laser annealed Si and Ge - Kiger, Shanalyn. (My University, 1985)
Call number: LD2668 .T4 1985 K53
Keywords: Backscattering.; Ion implantation.; Semiconductors--Impurity distribution.; Semiconductor lasers.; Germanium--Spectra.; Silicon--Spectra.; Masters theses