Fronk, Ryan G.2017-04-192017-04-192017-05-01http://hdl.handle.net/2097/35426Interest in high-efficiency replacements for thin-film-coated thermal neutron detectors led to the development of single-sided microstructured semiconductor neutron detectors (MSNDs). MSNDs are designed with micro-sized trench structures that are etched into a vertically-oriented pvn-junction diode, and backfilled with a neutron converting material, such as ⁶LiF. Neutrons absorbed by the converting material produce a pair of charged-particle reaction products that can be measured by the diode substrate. MSNDs have higher neutron-absorption and reaction-product counting efficiencies than their thin-film-coated counterparts, resulting in up to a 10x increase in intrinsic thermal neutron detection efficiency. The detection efficiency for a single-sided MSND is reduced by neutron streaming paths between the conversion-material filled regions that consequently allow neutrons to pass undetected through the detector. Previously, the highest reported intrinsic thermal neutron detection efficiency for a single MSND was approximately 30%. Methods for double-stacking and aligning MSNDs to reduce neutron streaming produced devices with an intrinsic thermal neutron detection efficiency of 42%. Presented here is a new type of MSND that features a complementary second set of trenches that are etched into the back-side of the detector substrate. These dual-sided microstructured semiconductor neutron detectors (DS-MSNDs) have the ability to absorb and detect neutrons that stream through the front-side, effectively doubling the detection efficiency of a single-sided device. DS-MSND sensors are theoretically capable of achieving greater than 80% intrinsic thermal neutron detection efficiency for a 1-mm thick device. Prototype DS-MSNDs with diffused pvp-junction operated at 0-V applied bias have achieved 53.54±0.61%, exceeding that of the single-sided MSNDs and double-stacked MSNDs to represent a new record for detection efficiency for such solid-state devices.en-US© the author. This Item is protected by copyright and/or related rights. You are free to use this Item in any way that is permitted by the copyright and related rights legislation that applies to your use. For other uses you need to obtain permission from the rights-holder(s).http://rightsstatements.org/vocab/InC/1.0/NeutronRadiationNeutron detectionRadiation detectionDual-side etched microstructured semiconductor neutron detectorsDissertation