Femtosecond Laser Backside Ablation of Gold Film on Silicon Substrate

K-REx Repository

Show simple item record

dc.contributor.author Lei, Shuting
dc.contributor.author Grojo, D.
dc.contributor.author Ma, J.
dc.contributor.author Yu, Xiaoming
dc.contributor.author Wu, H.
dc.date.accessioned 2017-11-30T21:49:40Z
dc.date.available 2017-11-30T21:49:40Z
dc.identifier.uri http://hdl.handle.net/2097/38393
dc.description Citation: Lei, S., Grojo, D., Ma, J., Yu, X., & Wu, H. (2016). Femtosecond Laser Backside Ablation of Gold Film on Silicon Substrate. Procedia Manufacturing, 5, 594-608. doi:10.1016/j.promfg.2016.08.049
dc.description.abstract Femtosecond laser ablation of gold thin film on the front and backside of silicon substrate is investigated, with backside ablation being the focus and front side ablation for comparison. The experiments are performed using 100 fs pulses delivered through an ultrafast laser source combined with an OPA for wavelength conversion at 1300 nm. We create a single shot ablation matrix by varying focus position and pulse energy. The laser beam is characterized using an IR imaging technique at both the front and backside of the substrate. It is found that the pulse profile experiences little distortion after passing though the 1 mm silicon substrate, despite the high pulse energy used. However, a comparison of the front and back ablation site indicates significant attenuation of pulse energy due to nonlinear absorption. Two types of damage happen depending on laser fluence: ablation and burst. Burst damage is confirmed with finite element simulation. © 2016 The Authors
dc.relation.uri https://doi.org/10.1016/j.promfg.2016.08.049
dc.rights Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0)
dc.rights.uri https://creativecommons.org/licenses/by-nc-nd/4.0/
dc.subject Au Thin Film
dc.subject Fem Simulation
dc.subject Fs Laser
dc.subject Laser Backside Ablation
dc.subject Silicon Substrate
dc.title Femtosecond Laser Backside Ablation of Gold Film on Silicon Substrate
dc.type Article
dc.date.published 2016
dc.citation.doi 10.1016/j.promfg.2016.08.049
dc.citation.epage 608
dc.citation.issn 2351-9789
dc.citation.jtitle Procedia Manufacturing
dc.citation.spage 594
dc.citation.volume 5
dc.contributor.authoreid lei
dc.contributor.kstate Lei, Shuting


Files in this item

This item appears in the following Collection(s)

Show simple item record

Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) Except where otherwise noted, the use of this item is bound by the following: Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0)

Search K-REx


Advanced Search

Browse

My Account

Statistics








Center for the

Advancement of Digital

Scholarship

118 Hale Library

Manhattan KS 66506


(785) 532-7444

cads@k-state.edu