Browsing College of Engineering by Subject "Deposition temperature"

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Browsing College of Engineering by Subject "Deposition temperature"

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  • Wei, Daming; Hossain, T.; Garces, N. Y.; Nepal, N.; Meyer, H. M., III; Kirkham, M. J.; Eddy, C. R. Jr.; Edgar, James H. (2013-08-28)
    This paper reports on the influence of deposition temperature on the structure, composition, and electrical properties of TiO[subscript 2] thin films deposited on n-type silicon (100) by plasma-assisted atomic layer ...

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