Wei, Daming; Hossain, T.; Garces, N. Y.; Nepal, N.; Meyer, H. M., III; Kirkham, M. J.; Eddy, C. R. Jr.; Edgar, James H.
(2013-08-28)
This paper reports on the influence of deposition temperature on the structure, composition, and electrical properties of TiO[subscript 2] thin films deposited on n-type silicon (100) by plasma-assisted atomic layer ...