Browsing Industrial and Manufacturing Systems Engineering by Subject "Electrolytic in-process dressing"

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Browsing Industrial and Manufacturing Systems Engineering by Subject "Electrolytic in-process dressing"

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  • Liu, J. H.; Pei, Zhijian J.; Fisher, Graham R. (2009-11-25)
    Silicon wafers are the most widely used substrates for fabricating integrated circuits. There have been continuous demands for higher quality silicon wafers with lower prices, and it becomes more and more difficult to meet ...

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