Browsing K-State Research Forum by Subject "Dry thermal oxidation"

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Browsing K-State Research Forum by Subject "Dry thermal oxidation"

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  • Wei, D.; Edgar, James H.; Meyer, H.M. (2011-06-27)
    The oxidation of group three nitride semiconductors is an important aspect in the fabrication of high power transistors with insulated gates. Gallium nitride (GaN) and its alloys (AlGaN) have electrical properties that are ...

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