Browsing Industrial and Manufacturing Systems Engineering Faculty Research and Publications by Author "Liu, J. H."

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Browsing Industrial and Manufacturing Systems Engineering Faculty Research and Publications by Author "Liu, J. H."

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  • Liu, J. H.; Pei, Zhijian J.; Fisher, Graham R. (2007)
    Silicon wafers are the most widely used substrates for fabricating integrated circuits. There have been continuous demands for higher quality silicon wafers with lower prices, and it becomes more and more difficult to meet ...
  • Liu, J. H.; Pei, Zhijian J.; Fisher, Graham R. (2007)
    Grinding is an important process for manufacturing of silicon wafers. The demand for silicon wafers with better quality and lower price presents tremendous challenges for the grinding wheels used in the silicon wafer ...