Browsing Industrial and Manufacturing Systems Engineering Faculty Research and Publications by Published Date "2006"

Now showing items 1-3 of 3

Simultaneous double side grinding of silicon wafers: a literature review

Li, Z. C.; Pei, Zhijian J.; Fisher, Graham R. (2009-11-25)

Silicon wafers are the most widely used substrates for fabricating integrated circuits (ICs). The quality of ICs depends directly on the quality of silicon wafers. A series of processes are required to manufacture high ...
Rotary ultrasonic machining of titanium alloy: effects of machining variables

Churi, N. J.; Pei, Zhijian J.; Treadwell, C. (2009-12-01)

Titanium and its alloys are finding prime applications in industries due to their unique properties. However, high cost of machining is one of the limiting factors for their widespread use. Tremendous efforts are being ...
Edge-chipping reduction in rotary ultrasonic machining of ceramics: finite element analysis and experimental verification

Li, Z. C.; Cai, Liang-Wu; Pei, Zhijian J.; Treadwell, C. (2009-11-25)

Rotary ultrasonic machining (RUM) is one of the machining processes for advanced ceramics. Edge chipping (or chamfer), commonly observed in RUM of ceramic materials, not only compromises geometric accuracy but also possibly ...