Browsing Chemical Engineering Faculty Research and Publications by Subject "Semiconducting III-V materials"

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Browsing Chemical Engineering Faculty Research and Publications by Subject "Semiconducting III-V materials"

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  • Edgar, James H.; Bohnen, T.; Hageman, P. R. (2008)
    The epitaxy of scandium nitride deposited by hydride vapor phase epitaxy on 6HSiC( 0001) substrates is reported. The structure and composition of the deposited films were dependent on both the scandium metal source and ...