Browsing Chemical Engineering Faculty Research and Publications by Subject "Hydride vapor phase epitaxy"

K-REx Repository

Browsing Chemical Engineering Faculty Research and Publications by Subject "Hydride vapor phase epitaxy"

Sort by: Order: Results:

  • Edgar, James H.; Bohnen, T.; Hageman, P. R. (2008)
    The epitaxy of scandium nitride deposited by hydride vapor phase epitaxy on 6HSiC( 0001) substrates is reported. The structure and composition of the deposited films were dependent on both the scandium metal source and ...