Browsing Industrial and Manufacturing Systems Engineering by Subject "Modeling"

K-REx Repository

Browsing Industrial and Manufacturing Systems Engineering by Subject "Modeling"

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  • Li, Z. C.; Pei, Zhijian J.; Fisher, Graham R. (2009-11-25)
    Silicon wafers are the most widely used substrates for fabricating integrated circuits (ICs). The quality of ICs depends directly on the quality of silicon wafers. A series of processes are required to manufacture high ...

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