Browsing Industrial and Manufacturing Systems Engineering by Subject "Lithium niobate"

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Browsing Industrial and Manufacturing Systems Engineering by Subject "Lithium niobate"

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  • Pei, Zhijian J.; Fisher, Graham R.; Liu, J. (2009-11-25)
    The majority of semiconductor devices are built on silicon wafers. Manufacturing of high quality silicon wafers involves several machining processes including grinding. This review paper discusses historical perspectives ...

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