Browsing Industrial and Manufacturing Systems Engineering by Subject "Laser Backside Ablation"

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Browsing Industrial and Manufacturing Systems Engineering by Subject "Laser Backside Ablation"

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  • Lei, Shuting; Grojo, D.; Ma, J.; Yu, Xiaoming; Wu, H.
    Femtosecond laser ablation of gold thin film on the front and backside of silicon substrate is investigated, with backside ablation being the focus and front side ablation for comparison. The experiments are performed using ...

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